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Measurement Science and Technology &
Scanning Probe Microscopy

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Electrical Force Microscopy

The field of electrical force detection in AFM is very wide. Here, we have selected a technique, where the electrical forces are separated from the topography with modulated voltage applied between tip and sample.
The students can go through some basic formulas and finally measure on a provided transistor structure capacitance differences caused by different thicknesses of oxide layers.

scan image example