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Measurement Science and Technology &
Scanning Probe Microscopy

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Kelvin Probe Force Microscopy



After the basic EFM experiment, the implementation of a further feedback, the Kelvin feedback, can help to detect work function differences on surfaces as well as local charges.

The students can image those work function differences on a dopant grating made of silicon. They get an impression about the relation between the
possible lateral resolution in electrical images and the carrier concentration on the sample surface. They also memorize some basics about work functions,
e.g. that they are not detectable in absolute values, onyl as relative values vs. a second material.


Scan image example