|
|
|
Anfatec Instruments AGMeasurement Science and Technology &Copyright / Impressum
|
| lateral resolution | better than 5 nm (at standard samples) |
| height resolution | better than 0,4 nm (atomic steps) |
| maximum scan range | 30 mm (standard, others possible on request) |
| maximum sample size | 4 cm x 4 cm |
| manual positioning range | 5 mm x 5 mm |
| accessories | 130 cantilevers of different types, small empty cantilever boxes, tweezers, sample holders, over 15 different samples |